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Structural models and design rules for on-chip micro-channe..:

Hubbard, Neal B ; Howell, Larry L ; Barber, John P...
Journal of Micromechanics and Microengineering.  15 (2005)  4 - p. 720-727 , 2005
Link: https://doi.org/10.1088/0960-1317/15/4/008