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Fabrication and modeling of silicon-embedded high-Qinductor:
Pan, Tingrui
;
Baldi, Antonio
;
Davies-Venn, Emile
..
Journal of Micromechanics and Microengineering. 15 (2005) 4 - p. 849-854 , 2005
Link:
https://doi.org/10.1088/0960-1317/15/4/024
RT Journal T1 <Title>Fabrication and modeling of silicon-embedded high-Qinductors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_15_4_024&Exemplar=1&LAN=DE A1 Pan, Tingrui A1 Baldi, Antonio A1 Davies-Venn, Emile A1 Drayton, Rhonda F A1 Ziaie, Babak PB IOP Publishing YR 2005 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 15 IS 4 SP 849 OP 854 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/15/4/024 DO https://doi.org/10.1088/0960-1317/15/4/024 SF ELIB - SuUB Bremen
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