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Micromachined air-gap structure MEMS acoustic sensor using ..:

Ko, Sang Choon ; Jun, Chi-Hoon ; Jang, Won Ick.
Journal of Micromechanics and Microengineering.  16 (2006)  10 - p. 2071-2076 , 2006
Link: https://doi.org/10.1088/0960-1317/16/10/021