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1 Ergebnisse
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Comprehensive spring constant modelling of tethered microme..:
Lishchynska, Maryna
;
O'Mahony, Conor
;
Slattery, Orla
.
Journal of Micromechanics and Microengineering. 16 (2006) 6 - p. S61-S67 , 2006
Link:
https://doi.org/10.1088/0960-1317/16/6/s10
RT Journal T1
Comprehensive spring constant modelling of tethered micromechanical plates
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_16_6_s10&Exemplar=1&LAN=DE A1 Lishchynska, Maryna A1 O'Mahony, Conor A1 Slattery, Orla A1 Behan, Robert PB IOP Publishing YR 2006 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 16 IS 6 SP S61 OP S67 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/16/6/s10 DO https://doi.org/10.1088/0960-1317/16/6/s10 SF ELIB - SuUB Bremen
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