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1 Ergebnisse
1
The lateral instability problem in electrostatic comb drive..:
Borovic, B
;
Lewis, F L
;
Liu, A Q
..
Journal of Micromechanics and Microengineering. 16 (2006) 7 - p. 1233-1241 , 2006
Link:
https://doi.org/10.1088/0960-1317/16/7/017
RT Journal T1 <Title>The lateral instability problem in electrostatic comb drive actuators: modeling and feedback control</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_16_7_017&Exemplar=1&LAN=DE A1 Borovic, B A1 Lewis, F L A1 Liu, A Q A1 Kolesar, E S A1 Popa, D PB IOP Publishing YR 2006 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 16 IS 7 SP 1233 OP 1241 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/16/7/017 DO https://doi.org/10.1088/0960-1317/16/7/017 SF ELIB - SuUB Bremen
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