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1 Ergebnisse
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IR laser-assisted micro/nano-imprinting:
Chen, Chun-Hung
;
Liu, Chuan-Pu
;
Lee, Yung-Chun
...
Journal of Micromechanics and Microengineering. 16 (2006) 8 - p. 1463-1467 , 2006
Link:
https://doi.org/10.1088/0960-1317/16/8/004
RT Journal T1 <Title>IR laser-assisted micro/nano-imprinting</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_16_8_004&Exemplar=1&LAN=DE A1 Chen, Chun-Hung A1 Liu, Chuan-Pu A1 Lee, Yung-Chun A1 Hsiao, Fei-Bin A1 Chiu, Cheng-Yu A1 Chung, Ming-Hung A1 Chiang, Ming-Hsueh PB IOP Publishing YR 2006 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 16 IS 8 SP 1463 OP 1467 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/16/8/004 DO https://doi.org/10.1088/0960-1317/16/8/004 SF ELIB - SuUB Bremen
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