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1 Ergebnisse
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Design, fabrication and characterization of a bulk-PZT-actu..:
Xu, Xiao-Hui
;
Li, Bao-Qing
;
Feng, Yan
.
Journal of Micromechanics and Microengineering. 17 (2007) 12 - p. 2439-2446 , 2007
Link:
https://doi.org/10.1088/0960-1317/17/12/008
RT Journal T1 <Title>Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_17_12_008&Exemplar=1&LAN=DE A1 Xu, Xiao-Hui A1 Li, Bao-Qing A1 Feng, Yan A1 Chu, Jia-Ru PB IOP Publishing YR 2007 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 17 IS 12 SP 2439 OP 2446 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/17/12/008 DO https://doi.org/10.1088/0960-1317/17/12/008 SF ELIB - SuUB Bremen
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