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1 Ergebnisse
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Fabrication and characterization of an ultrasensitive acous..:
Sievilä, P
;
Rytkönen, V-P
;
Hahtela, O
...
Journal of Micromechanics and Microengineering. 17 (2007) 5 - p. 852-859 , 2007
Link:
https://doi.org/10.1088/0960-1317/17/5/002
RT Journal T1 <Title>Fabrication and characterization of an ultrasensitive acousto-optical cantilever</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_17_5_002&Exemplar=1&LAN=DE A1 Sievilä, P A1 Rytkönen, V-P A1 Hahtela, O A1 Chekurov, N A1 Kauppinen, J A1 Tittonen, I PB IOP Publishing YR 2007 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 17 IS 5 SP 852 OP 859 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/17/5/002 DO https://doi.org/10.1088/0960-1317/17/5/002 SF ELIB - SuUB Bremen
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