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An isotropic suspension system for a biaxial accelerometer ..:
Lee, Jin Seung
;
Lee, Seung S
Journal of Micromechanics and Microengineering. 18 (2008) 2 - p. 025036 , 2008
Link:
https://doi.org/10.1088/0960-1317/18/2/025036
RT Journal T1 <Title>An isotropic suspension system for a biaxial accelerometer using electroplated thick metal with a HAR SU-8 mold</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_18_2_025036&Exemplar=1&LAN=DE A1 Lee, Jin Seung A1 Lee, Seung S PB IOP Publishing YR 2008 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 18 IS 2 SP 025036 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/18/2/025036 DO https://doi.org/10.1088/0960-1317/18/2/025036 SF ELIB - SuUB Bremen
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