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The effects of non-uniform nanoscale deflections on capacit..:
Elshurafa, A M
;
El-Masry, E I
Journal of Micromechanics and Microengineering. 18 (2008) 4 - p. 045012 , 2008
Link:
https://doi.org/10.1088/0960-1317/18/4/045012
RT Journal T1 <Title>The effects of non-uniform nanoscale deflections on capacitance in RF MEMS parallel-plate variable capacitors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_18_4_045012&Exemplar=1&LAN=DE A1 Elshurafa, A M A1 El-Masry, E I PB IOP Publishing YR 2008 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 18 IS 4 SP 045012 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/18/4/045012 DO https://doi.org/10.1088/0960-1317/18/4/045012 SF ELIB - SuUB Bremen
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