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Substrates and dimension dependence of MEMS inductors:
Lee, Joonyeop
;
Park, Sewan
;
Kim, Hyeon Cheol
.
Journal of Micromechanics and Microengineering. 19 (2009) 8 - p. 085014 , 2009
Link:
https://doi.org/10.1088/0960-1317/19/8/085014
RT Journal T1 <Title>Substrates and dimension dependence of MEMS inductors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_19_8_085014&Exemplar=1&LAN=DE A1 Lee, Joonyeop A1 Park, Sewan A1 Kim, Hyeon Cheol A1 Chun, Kukjin PB IOP Publishing YR 2009 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 19 IS 8 SP 085014 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/19/8/085014 DO https://doi.org/10.1088/0960-1317/19/8/085014 SF ELIB - SuUB Bremen
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