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Large displacement vertical translational actuator based on..:

Qiu, Zhen ; Pulskamp, Jeffrey S ; Lin, Xianke...
Journal of Micromechanics and Microengineering.  20 (2010)  7 - p. 075016 , 2010
Link: https://doi.org/10.1088/0960-1317/20/7/075016