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Dry fabrication of microdevices by the combination of focus..:
Chekurov, N
;
Grigoras, K
;
Sainiemi, L
...
Journal of Micromechanics and Microengineering. 20 (2010) 8 - p. 085009 , 2010
Link:
https://doi.org/10.1088/0960-1317/20/8/085009
RT Journal T1 <Title>Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_20_8_085009&Exemplar=1&LAN=DE A1 Chekurov, N A1 Grigoras, K A1 Sainiemi, L A1 Peltonen, A A1 Tittonen, I A1 Franssila, S PB IOP Publishing YR 2010 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 20 IS 8 SP 085009 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/20/8/085009 DO https://doi.org/10.1088/0960-1317/20/8/085009 SF ELIB - SuUB Bremen
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