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Investigation of Si(h k l) surfaces etched in KOH solutions..:
Rola, K P
;
Zubel, I
Journal of Micromechanics and Microengineering. 21 (2011) 11 - p. 115026 , 2011
Link:
https://doi.org/10.1088/0960-1317/21/11/115026
RT Journal T1 <Title>Investigation of Si(h k l) surfaces etched in KOH solutions saturated withtertiary-butyl alcohol</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_21_11_115026&Exemplar=1&LAN=DE A1 Rola, K P A1 Zubel, I PB IOP Publishing YR 2011 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 21 IS 11 SP 115026 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/21/11/115026 DO https://doi.org/10.1088/0960-1317/21/11/115026 SF ELIB - SuUB Bremen
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