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1 Ergebnisse
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An out-of-plane electrostatic actuator based on the lever p..:
Ren, Hao
;
Tao, Fenggang
;
Wang, Weimin
.
Journal of Micromechanics and Microengineering. 21 (2011) 4 - p. 045019 , 2011
Link:
https://doi.org/10.1088/0960-1317/21/4/045019
RT Journal T1 <Title>An out-of-plane electrostatic actuator based on the lever principle</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_21_4_045019&Exemplar=1&LAN=DE A1 Ren, Hao A1 Tao, Fenggang A1 Wang, Weimin A1 Yao, Jun PB IOP Publishing YR 2011 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 21 IS 4 SP 045019 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/21/4/045019 DO https://doi.org/10.1088/0960-1317/21/4/045019 SF ELIB - SuUB Bremen
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