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1 Ergebnisse
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CMOS-compatible fabrication of top-gated field-effect trans..:
Ginet, Patrick
;
Akiyama, Sho
;
Takama, Nobuyuki
..
Journal of Micromechanics and Microengineering. 21 (2011) 6 - p. 065008 , 2011
Link:
https://doi.org/10.1088/0960-1317/21/6/065008
RT Journal T1 <Title>CMOS-compatible fabrication of top-gated field-effect transistor silicon nanowire-based biosensors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_21_6_065008&Exemplar=1&LAN=DE A1 Ginet, Patrick A1 Akiyama, Sho A1 Takama, Nobuyuki A1 Fujita, Hiroyuki A1 Kim, Beomjoon PB IOP Publishing YR 2011 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 21 IS 6 SP 065008 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/21/6/065008 DO https://doi.org/10.1088/0960-1317/21/6/065008 SF ELIB - SuUB Bremen
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