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Fabrication of an array of silicon microscales for the moni..:

Lacolle, M ; Johansen, I R ; Wang, D...
Journal of Micromechanics and Microengineering.  22 (2012)  7 - p. 074003 , 2012
Link: https://doi.org/10.1088/0960-1317/22/7/074003