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1 Ergebnisse
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Microfabrication and calibration of a single-polarity piezo..:
Gharib, H H
;
Moussa, W A
Journal of Micromechanics and Microengineering. 23 (2013) 3 - p. 035019 , 2013
Link:
https://doi.org/10.1088/0960-1317/23/3/035019
RT Journal T1 <Title>Microfabrication and calibration of a single-polarity piezoresistive three-dimensional stress sensing chip</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_23_3_035019&Exemplar=1&LAN=DE A1 Gharib, H H A1 Moussa, W A PB IOP Publishing YR 2013 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 23 IS 3 SP 035019 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/23/3/035019 DO https://doi.org/10.1088/0960-1317/23/3/035019 SF ELIB - SuUB Bremen
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