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1 Ergebnisse
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Design and fabrication of in-plane AFM probes with sharp si..:
Geerlings, J
;
Sarajlic, E
;
Berenschot, J W
...
Journal of Micromechanics and Microengineering. 24 (2014) 10 - p. 105013 , 2014
Link:
https://doi.org/10.1088/0960-1317/24/10/105013
RT Journal T1 <Title>Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_24_10_105013&Exemplar=1&LAN=DE A1 Geerlings, J A1 Sarajlic, E A1 Berenschot, J W A1 Siekman, M H A1 Jansen, H V A1 Abelmann, L A1 Tas, N R PB IOP Publishing YR 2014 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 24 IS 10 SP 105013 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/24/10/105013 DO https://doi.org/10.1088/0960-1317/24/10/105013 SF ELIB - SuUB Bremen
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