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1 Ergebnisse
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A systematic approach for precision electrostatic mode tuni..:
Hu, Z X
;
Gallacher, B J
;
Burdess, J S
..
Journal of Micromechanics and Microengineering. 24 (2014) 12 - p. 125003 , 2014
Link:
https://doi.org/10.1088/0960-1317/24/12/125003
RT Journal T1 <Title>A systematic approach for precision electrostatic mode tuning of a MEMS gyroscope</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_24_12_125003&Exemplar=1&LAN=DE A1 Hu, Z X A1 Gallacher, B J A1 Burdess, J S A1 Bowles, S R A1 Grigg, H T D PB IOP Publishing YR 2014 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 24 IS 12 SP 125003 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/24/12/125003 DO https://doi.org/10.1088/0960-1317/24/12/125003 SF ELIB - SuUB Bremen
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