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1 Ergebnisse
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Tilted microlens fabrication method using two photoresists ..:
Hung, Shih-Yu
;
Chang, Tung-Yu
;
Shen, Ming-Ho
.
Journal of Micromechanics and Microengineering. 24 (2014) 2 - p. 025013 , 2014
Link:
https://doi.org/10.1088/0960-1317/24/2/025013
RT Journal T1 <Title>Tilted microlens fabrication method using two photoresists with different melting temperatures</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_24_2_025013&Exemplar=1&LAN=DE A1 Hung, Shih-Yu A1 Chang, Tung-Yu A1 Shen, Ming-Ho A1 Yang, Hsiharng PB IOP Publishing YR 2014 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 24 IS 2 SP 025013 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/24/2/025013 DO https://doi.org/10.1088/0960-1317/24/2/025013 SF ELIB - SuUB Bremen
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