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Fabrication of nanoelectromechanical systems via the integr..:

Westwood, J N ; Sauer, V T K ; Kwan, J K..
Journal of Micromechanics and Microengineering.  24 (2014)  6 - p. 065021 , 2014
Link: https://doi.org/10.1088/0960-1317/24/6/065021