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Lift-off of large-scale ultrathin nanomembranes:
Miller, Joshua J
;
Carter, Robert N
;
McNabb, Kelly B
...
Journal of Micromechanics and Microengineering. 25 (2014) 1 - p. 015011 , 2014
Link:
https://doi.org/10.1088/0960-1317/25/1/015011
RT Journal T1 <Title>Lift-off of large-scale ultrathin nanomembranes</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_25_1_015011&Exemplar=1&LAN=DE A1 Miller, Joshua J A1 Carter, Robert N A1 McNabb, Kelly B A1 DesOrmeaux, Jon-Paul S A1 Striemer, Christopher C A1 Winans, Joshua D A1 Gaborski, Thomas R PB IOP Publishing YR 2014 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 25 IS 1 SP 015011 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/25/1/015011 DO https://doi.org/10.1088/0960-1317/25/1/015011 SF ELIB - SuUB Bremen
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