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Wafer-scale fabrication of self-actuated piezoelectric nano..:
Dezest, D
;
Thomas, O
;
Mathieu, F
...
Journal of Micromechanics and Microengineering. 25 (2015) 3 - p. 035002 , 2015
Link:
https://doi.org/10.1088/0960-1317/25/3/035002
RT Journal T1 <Title>Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_25_3_035002&Exemplar=1&LAN=DE A1 Dezest, D A1 Thomas, O A1 Mathieu, F A1 Mazenq, L A1 Soyer, C A1 Costecalde, J A1 Remiens, D A1 Deü, J F A1 Nicu, L PB IOP Publishing YR 2015 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 25 IS 3 SP 035002 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/25/3/035002 DO https://doi.org/10.1088/0960-1317/25/3/035002 SF ELIB - SuUB Bremen
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