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1 Ergebnisse
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Fabrication and characterisation of suspended microstructur..:
Al-masha'al, A
;
Mastropaolo, E
;
Bunting, A
..
Journal of Micromechanics and Microengineering. 27 (2016) 1 - p. 015020 , 2016
Link:
https://doi.org/10.1088/0960-1317/27/1/015020
RT Journal T1 <Title>Fabrication and characterisation of suspended microstructures of tantalum</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_27_1_015020&Exemplar=1&LAN=DE A1 Al-masha'al, A A1 Mastropaolo, E A1 Bunting, A A1 Dunare, C A1 Cheung, R PB IOP Publishing YR 2016 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 27 IS 1 SP 015020 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/27/1/015020 DO https://doi.org/10.1088/0960-1317/27/1/015020 SF ELIB - SuUB Bremen
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