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1 Ergebnisse
1
Electrostatically levitated microactuators:
Kumar, S
;
Cho, Dan
Journal of Micromechanics and Microengineering. 2 (1992) 2 - p. 96-103 , 1992
Link:
https://doi.org/10.1088/0960-1317/2/2/005
RT Journal T1 <Title>Electrostatically levitated microactuators</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_2_2_005&Exemplar=1&LAN=DE A1 Kumar, S A1 Cho, Dan PB IOP Publishing YR 1992 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 2 IS 2 SP 96 OP 103 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/2/2/005 DO https://doi.org/10.1088/0960-1317/2/2/005 SF ELIB - SuUB Bremen
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