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Computer-aided characterization of the elastic properties o..:
Maier-Schneider, D
;
Maibach, J
;
Obermeier, E
Journal of Micromechanics and Microengineering. 2 (1992) 3 - p. 173-175 , 1992
Link:
https://doi.org/10.1088/0960-1317/2/3/011
RT Journal T1 <Title>Computer-aided characterization of the elastic properties of thin films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_2_3_011&Exemplar=1&LAN=DE A1 Maier-Schneider, D A1 Maibach, J A1 Obermeier, E PB IOP Publishing YR 1992 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 2 IS 3 SP 173 OP 175 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/2/3/011 DO https://doi.org/10.1088/0960-1317/2/3/011 SF ELIB - SuUB Bremen
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