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1
Fluorinated polyimide fabrication by magnetically controlle..:
Furuya, A
;
Shimokawa, F
;
Matsuura, T
.
Journal of Micromechanics and Microengineering. 4 (1994) 2 - p. 67-73 , 1994
Link:
https://doi.org/10.1088/0960-1317/4/2/004
RT Journal T1 <Title>Fluorinated polyimide fabrication by magnetically controlled reactive ion etching (MC RIE)</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_4_2_004&Exemplar=1&LAN=DE A1 Furuya, A A1 Shimokawa, F A1 Matsuura, T A1 Sawada, R PB IOP Publishing YR 1994 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 4 IS 2 SP 67 OP 73 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/4/2/004 DO https://doi.org/10.1088/0960-1317/4/2/004 SF ELIB - SuUB Bremen
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