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1 Ergebnisse
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On-chip redundant measurement principles realized by a sili..:
Hausner, M
;
Hillebrecht, C
;
Karagözoglu, H
..
Journal of Micromechanics and Microengineering. 7 (1997) 3 - p. 259-262 , 1997
Link:
https://doi.org/10.1088/0960-1317/7/3/049
RT Journal T1 <Title>On-chip redundant measurement principles realized by a silicon sensor substrate</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_7_3_049&Exemplar=1&LAN=DE A1 Hausner, M A1 Hillebrecht, C A1 Karagözoglu, H A1 Zacheja, J A1 Binder, J PB IOP Publishing YR 1997 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 7 IS 3 SP 259 OP 262 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/7/3/049 DO https://doi.org/10.1088/0960-1317/7/3/049 SF ELIB - SuUB Bremen
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