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1 Ergebnisse
1
Resist dissolution rate and inclined-wall structures in dee..:
Liu, Z
;
Bouamrane, F
;
Roulliay, M
...
Journal of Micromechanics and Microengineering. 8 (1998) 4 - p. 293-300 , 1998
Link:
https://doi.org/10.1088/0960-1317/8/4/006
RT Journal T1 <Title>Resist dissolution rate and inclined-wall structures in deep x-ray lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_8_4_006&Exemplar=1&LAN=DE A1 Liu, Z A1 Bouamrane, F A1 Roulliay, M A1 Kupka, R K A1 Labèque, A A1 Megtert, S PB IOP Publishing YR 1998 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 8 IS 4 SP 293 OP 300 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/8/4/006 DO https://doi.org/10.1088/0960-1317/8/4/006 SF ELIB - SuUB Bremen
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