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1 Ergebnisse
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High aspect ratio UV photolithography for electroplated str..:
Roth, S
;
Dellmann, L
;
Racine, G-A
.
Journal of Micromechanics and Microengineering. 9 (1999) 2 - p. 105-108 , 1999
Link:
https://doi.org/10.1088/0960-1317/9/2/001
RT Journal T1 <Title>High aspect ratio UV photolithography for electroplated structures</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_0960-1317_9_2_001&Exemplar=1&LAN=DE A1 Roth, S A1 Dellmann, L A1 Racine, G-A A1 Rooij, N F de PB IOP Publishing YR 1999 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 9 IS 2 SP 105 OP 108 LK http://dx.doi.org/https://doi.org/10.1088/0960-1317/9/2/001 DO https://doi.org/10.1088/0960-1317/9/2/001 SF ELIB - SuUB Bremen
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