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1 Ergebnisse
1
Recent Developments in Magnetron Sputtering:
Xiang, Yu
;
Chengbiao, Wang
;
Yang, Liu
..
Plasma Science and Technology. 8 (2006) 3 - p. 337-343 , 2006
Link:
https://doi.org/10.1088/1009-0630/8/3/20
RT Journal T1 <Title>Recent Developments in Magnetron Sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1009-0630_8_3_20&Exemplar=1&LAN=DE A1 Xiang, Yu A1 Chengbiao, Wang A1 Yang, Liu A1 Deyang, Yu A1 Tingyan, Xing PB IOP Publishing YR 2006 SN 1009-0630 JF Plasma Science and Technology VO 8 IS 3 SP 337 OP 343 LK http://dx.doi.org/https://doi.org/10.1088/1009-0630/8/3/20 DO https://doi.org/10.1088/1009-0630/8/3/20 SF ELIB - SuUB Bremen
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