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1 Ergebnisse
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Amorphous silicon nitride deposited by an NH3-free plasma e..:
Tsai, Dung-Sheng
;
Huang, Zhen-Li
;
Chang, Wei-Chih
.
Classical and Quantum Gravity. 39 (2022) 15 - p. 15LT01 , 2022
Link:
https://doi.org/10.1088/1361-6382/ac79f6
RT Journal T1
Amorphous silicon nitride deposited by an NH3-free plasma enhanced chemical vapor deposition method for the coatings of the next generation laser interferometer gravitational waves detector
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6382_ac79f6&Exemplar=1&LAN=DE A1 Tsai, Dung-Sheng A1 Huang, Zhen-Li A1 Chang, Wei-Chih A1 Chao, Shiuh PB IOP Publishing YR 2022 SN 0264-9381 SN 1361-6382 JF Classical and Quantum Gravity VO 39 IS 15 SP 15LT01 LK http://dx.doi.org/https://doi.org/10.1088/1361-6382/ac79f6 DO https://doi.org/10.1088/1361-6382/ac79f6 SF ELIB - SuUB Bremen
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