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Erratum: Development of wafer-level-packaging technology fo..:
Aono, T
;
Suzuki, K
;
Kanamaru, M
...
Journal of Micromechanics and Microengineering. 27 (2017) 5 - p. 059601 , 2017
Link:
https://doi.org/10.1088/1361-6439/aa681f
RT Journal T1 <Title>Erratum: Development of wafer-level-packaging technology for simultaneous sealing of accelerometer and gyroscope under different pressures (2016 J. Micromech. Microeng. 26 105007)</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aa681f&Exemplar=1&LAN=DE A1 Aono, T A1 Suzuki, K A1 Kanamaru, M A1 Okada, R A1 Maeda, D A1 Hayashi, M A1 Isono, Y PB IOP Publishing YR 2017 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 27 IS 5 SP 059601 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aa681f DO https://doi.org/10.1088/1361-6439/aa681f SF ELIB - SuUB Bremen
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