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1 Ergebnisse
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Design and fabrication of a silicon-based MEMS acceleration..:
Hwang, Jeongki
;
Ryu, Daeho
;
Park, Chihyun
...
Journal of Micromechanics and Microengineering. 27 (2017) 6 - p. 065009 , 2017
Link:
https://doi.org/10.1088/1361-6439/aa6cd2
RT Journal T1 <Title>Design and fabrication of a silicon-based MEMS acceleration switch working lower than 10 g</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aa6cd2&Exemplar=1&LAN=DE A1 Hwang, Jeongki A1 Ryu, Daeho A1 Park, Chihyun A1 Jang, Seung-gyo A1 Lee, Chung-il A1 Kim, Yong-Kweon PB IOP Publishing YR 2017 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 27 IS 6 SP 065009 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aa6cd2 DO https://doi.org/10.1088/1361-6439/aa6cd2 SF ELIB - SuUB Bremen
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