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Nanodiamond resonators fabricated on 8″ Si substrates using..:
Lebedev, V
;
Lisec, T
;
Yoshikawa, T
...
Journal of Micromechanics and Microengineering. 27 (2017) 6 - p. 065011 , 2017
Link:
https://doi.org/10.1088/1361-6439/aa6e76
RT Journal T1 <Title>Nanodiamond resonators fabricated on 8″ Si substrates using adhesive wafer bonding</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aa6e76&Exemplar=1&LAN=DE A1 Lebedev, V A1 Lisec, T A1 Yoshikawa, T A1 Reusch, M A1 Iankov, D A1 Giese, C A1 Žukauskaitė, A A1 Cimalla, V A1 Ambacher, O PB IOP Publishing YR 2017 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 27 IS 6 SP 065011 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aa6e76 DO https://doi.org/10.1088/1361-6439/aa6e76 SF ELIB - SuUB Bremen
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