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Numerical modeling and validation of squeezed-film damping ..:
Syed, Wajih U
;
Brimmo, Ayoola
;
Waheed, Owais
...
Journal of Micromechanics and Microengineering. 27 (2017) 7 - p. 075016 , 2017
Link:
https://doi.org/10.1088/1361-6439/aa71cb
RT Journal T1 <Title>Numerical modeling and validation of squeezed-film damping in vacuum-packaged industrial MEMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aa71cb&Exemplar=1&LAN=DE A1 Syed, Wajih U A1 Brimmo, Ayoola A1 Waheed, Owais A1 Bojesomo, Alabi A1 Ali, Mohamed Hassan A1 Ocak, Ilker A1 Chengliang, Sun A1 Chatterjee, Aveek A1 Elfadel, Ibrahim (Abe) M PB IOP Publishing YR 2017 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 27 IS 7 SP 075016 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aa71cb DO https://doi.org/10.1088/1361-6439/aa71cb SF ELIB - SuUB Bremen
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