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1 Ergebnisse
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Measurement of Young's modulus and residual stress of atomi..:
Purkl, Fabian
;
Daus, Alwin
;
English, Timothy S
...
Journal of Micromechanics and Microengineering. 27 (2017) 8 - p. 085008 , 2017
Link:
https://doi.org/10.1088/1361-6439/aa73e6
RT Journal T1 <Title>Measurement of Young's modulus and residual stress of atomic layer deposited Al2O3and Pt thin films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aa73e6&Exemplar=1&LAN=DE A1 Purkl, Fabian A1 Daus, Alwin A1 English, Timothy S A1 Provine, J A1 Feyh, Ando A1 Urban, Gerald A1 Kenny, Thomas W PB IOP Publishing YR 2017 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 27 IS 8 SP 085008 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aa73e6 DO https://doi.org/10.1088/1361-6439/aa73e6 SF ELIB - SuUB Bremen
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