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1 Ergebnisse
1
Self-formation of polymer nanostructures in plasma etching:..:
Du, Ke
;
Jiang, Youhua
;
Huang, Po-Shun
...
Journal of Micromechanics and Microengineering. 28 (2017) 1 - p. 014006 , 2017
Link:
https://doi.org/10.1088/1361-6439/aa9d28
RT Journal T1 <Title>Self-formation of polymer nanostructures in plasma etching: mechanisms and applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aa9d28&Exemplar=1&LAN=DE A1 Du, Ke A1 Jiang, Youhua A1 Huang, Po-Shun A1 Ding, Junjun A1 Gao, Tongchuan A1 Choi, Chang-Hwan PB IOP Publishing YR 2017 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 28 IS 1 SP 014006 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aa9d28 DO https://doi.org/10.1088/1361-6439/aa9d28 SF ELIB - SuUB Bremen
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