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1 Ergebnisse
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Development of CMOS MEMS inductive type tactile sensor with..:
Yeh, Sheng-Kai
;
Chang, Heng-Chung
;
Fang, Weileun
Journal of Micromechanics and Microengineering. 28 (2018) 4 - p. 044005 , 2018
Link:
https://doi.org/10.1088/1361-6439/aaac24
RT Journal T1 <Title>Development of CMOS MEMS inductive type tactile sensor with the integration of chrome steel ball force interface</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aaac24&Exemplar=1&LAN=DE A1 Yeh, Sheng-Kai A1 Chang, Heng-Chung A1 Fang, Weileun PB IOP Publishing YR 2018 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 28 IS 4 SP 044005 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aaac24 DO https://doi.org/10.1088/1361-6439/aaac24 SF ELIB - SuUB Bremen
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