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1 Ergebnisse
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High-aspect-ratio microstructures with versatile slanting a..:
Li, Liyi
;
Zhang, Cheng
;
Tuan, Chia-Chi
..
Journal of Micromechanics and Microengineering. 28 (2018) 5 - p. 055006 , 2018
Link:
https://doi.org/10.1088/1361-6439/aaaf2f
RT Journal T1 <Title>High-aspect-ratio microstructures with versatile slanting angles on silicon by uniform metal-assisted chemical etching</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aaaf2f&Exemplar=1&LAN=DE A1 Li, Liyi A1 Zhang, Cheng A1 Tuan, Chia-Chi A1 Chen, Yun A1 Wong, C-P PB IOP Publishing YR 2018 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 28 IS 5 SP 055006 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aaaf2f DO https://doi.org/10.1088/1361-6439/aaaf2f SF ELIB - SuUB Bremen
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