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1 Ergebnisse
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A CMOS-MEMS clamped–clamped beam displacement amplifier for..:
Liu, Jia-Ren
;
Lu, Shih-Chuan
;
Tsai, Chun-Pu
.
Journal of Micromechanics and Microengineering. 28 (2018) 6 - p. 065001 , 2018
Link:
https://doi.org/10.1088/1361-6439/aab112
RT Journal T1 <Title>A CMOS-MEMS clamped–clamped beam displacement amplifier for resonant switch applications</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aab112&Exemplar=1&LAN=DE A1 Liu, Jia-Ren A1 Lu, Shih-Chuan A1 Tsai, Chun-Pu A1 Li, Wei-Chang PB IOP Publishing YR 2018 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 28 IS 6 SP 065001 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aab112 DO https://doi.org/10.1088/1361-6439/aab112 SF ELIB - SuUB Bremen
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