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1 Ergebnisse
1
Development of a bipolar electrostatic chuck module with a ..:
Choi, Seungman
;
Wakabayashi, Kazuki
;
Takahashi, Kunio
.
Journal of Micromechanics and Microengineering. 28 (2018) 12 - p. 125011 , 2018
Link:
https://doi.org/10.1088/1361-6439/aae8ca
RT Journal T1
Development of a bipolar electrostatic chuck module with a beam-array assembly using the multiple etching process
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aae8ca&Exemplar=1&LAN=DE A1 Choi, Seungman A1 Wakabayashi, Kazuki A1 Takahashi, Kunio A1 Saito, Shigeki PB IOP Publishing YR 2018 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 28 IS 12 SP 125011 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aae8ca DO https://doi.org/10.1088/1361-6439/aae8ca SF ELIB - SuUB Bremen
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