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1 Ergebnisse
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Fabrication and characterization of a low-cost interposer w..:
Luo, Jiangbo
;
Wang, Guilian
;
Sun, Yunna
..
Journal of Micromechanics and Microengineering. 28 (2018) 12 - p. 125010 , 2018
Link:
https://doi.org/10.1088/1361-6439/aae8da
RT Journal T1 <Title>Fabrication and characterization of a low-cost interposer with an intact insulation layer and ultra-low TSV leakage current</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aae8da&Exemplar=1&LAN=DE A1 Luo, Jiangbo A1 Wang, Guilian A1 Sun, Yunna A1 Zhao, Xiaolin A1 Ding, Guifu PB IOP Publishing YR 2018 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 28 IS 12 SP 125010 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aae8da DO https://doi.org/10.1088/1361-6439/aae8da SF ELIB - SuUB Bremen
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