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1 Ergebnisse
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Position-dependent mass responsivity of silicon MEMS cantil..:
Patocka, F
;
Schneider, M
;
Dörr, N
..
Journal of Micromechanics and Microengineering. 29 (2019) 4 - p. 045009 , 2019
Link:
https://doi.org/10.1088/1361-6439/ab062a
RT Journal T1 <Title>Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ab062a&Exemplar=1&LAN=DE A1 Patocka, F A1 Schneider, M A1 Dörr, N A1 Schneidhofer, C A1 Schmid, U PB IOP Publishing YR 2019 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 29 IS 4 SP 045009 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ab062a DO https://doi.org/10.1088/1361-6439/ab062a SF ELIB - SuUB Bremen
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