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1 Ergebnisse
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Temperature-compensated CMOS-MEMS resonators via electrical..:
Liu, Jia-Ren
;
Li, Wei-Chang
Journal of Micromechanics and Microengineering. 30 (2019) 1 - p. 014002 , 2019
Link:
https://doi.org/10.1088/1361-6439/ab50ef
RT Journal T1 <Title>Temperature-compensated CMOS-MEMS resonators via electrical stiffness frequency pulling</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ab50ef&Exemplar=1&LAN=DE A1 Liu, Jia-Ren A1 Li, Wei-Chang PB IOP Publishing YR 2019 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 30 IS 1 SP 014002 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ab50ef DO https://doi.org/10.1088/1361-6439/ab50ef SF ELIB - SuUB Bremen
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