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1 Ergebnisse
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Optimization and characterization of direct UV laser writin..:
Srikanth, Sangam
;
Dudala, Sohan
;
Raut, Sushil
...
Journal of Micromechanics and Microengineering. 30 (2020) 9 - p. 095003 , 2020
Link:
https://doi.org/10.1088/1361-6439/ab92ea
RT Journal T1
Optimization and characterization of direct UV laser writing system for microscale applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_ab92ea&Exemplar=1&LAN=DE A1 Srikanth, Sangam A1 Dudala, Sohan A1 Raut, Sushil A1 Dubey, Satish Kumar A1 Ishii, Idaku A1 Javed, Arshad A1 Goel, Sanket PB IOP Publishing YR 2020 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 30 IS 9 SP 095003 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/ab92ea DO https://doi.org/10.1088/1361-6439/ab92ea SF ELIB - SuUB Bremen
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