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1 Ergebnisse
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Deposition and patterning of electrodes on the vertical sid..:
Bonnin, L
;
Piot, A
;
Isac, N
.
Journal of Micromechanics and Microengineering. 30 (2020) 10 - p. 105014 , 2020
Link:
https://doi.org/10.1088/1361-6439/aba377
RT Journal T1 <Title>Deposition and patterning of electrodes on the vertical sidewalls of deep trenches</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_aba377&Exemplar=1&LAN=DE A1 Bonnin, L A1 Piot, A A1 Isac, N A1 Bosseboeuf, A PB IOP Publishing YR 2020 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 30 IS 10 SP 105014 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/aba377 DO https://doi.org/10.1088/1361-6439/aba377 SF ELIB - SuUB Bremen
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