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Scaling effects and brittle fracture mechanisms in laser pu..:
Sakaev, I
;
Berg, Y
;
Kotler, Z
.
Journal of Micromechanics and Microengineering. 30 (2020) 11 - p. 115016 , 2020
Link:
https://doi.org/10.1088/1361-6439/abb757
RT Journal T1 <Title>Scaling effects and brittle fracture mechanisms in laser punching of PECVD SiO2 films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_abb757&Exemplar=1&LAN=DE A1 Sakaev, I A1 Berg, Y A1 Kotler, Z A1 Ishaaya, A A PB IOP Publishing YR 2020 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 30 IS 11 SP 115016 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/abb757 DO https://doi.org/10.1088/1361-6439/abb757 SF ELIB - SuUB Bremen
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