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1 Ergebnisse
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An efficient macro model for CMOS-MEMS thermal wind speed s..:
Zhang, Jia-Zhen
;
Zhou, Zai-Fa
;
Qin, Ming
.
Journal of Micromechanics and Microengineering. 30 (2020) 12 - p. 125001 , 2020
Link:
https://doi.org/10.1088/1361-6439/abb993
RT Journal T1 <Title>An efficient macro model for CMOS-MEMS thermal wind speed sensor</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1088_1361-6439_abb993&Exemplar=1&LAN=DE A1 Zhang, Jia-Zhen A1 Zhou, Zai-Fa A1 Qin, Ming A1 Huang, Qing-An PB IOP Publishing YR 2020 SN 0960-1317 SN 1361-6439 JF Journal of Micromechanics and Microengineering VO 30 IS 12 SP 125001 LK http://dx.doi.org/https://doi.org/10.1088/1361-6439/abb993 DO https://doi.org/10.1088/1361-6439/abb993 SF ELIB - SuUB Bremen
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